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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [1]
Creator
张玉峰 [1]
李元恒 [1]
李大军 [1]
杜永昌 [1]
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Journal ar... [1]
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1984 [1]
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中文 [1]
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北京大学学报(自然科... [1]
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Creator：杜永昌
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Language：中文
Document Type：期刊论文
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硅表层扩散杂质在CW-CO_2激光辐照后的电激活特性
期刊论文
北京大学学报(自然科学版), 1984, 卷号: 20, 期号: 5, 页码: 8-12
Authors:
张玉峰
;
杜永昌
;
李大军
;
李元恒
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Submit date：2009/08/03
薄层电阻
电激活
扩散杂质
扩硼
激光辐照
辐照后
固溶度极限
Co_2激光
面密度
