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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(1... [15]
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中频对靶反应磁控溅射Al_2O_3、TiO_2、ZrO_2功能薄膜的特性研究
期刊论文
新技术新工艺, 2008, 期号: 8, 页码: 101-104+4
Authors:
贾军伟
;
潘文霞
;
黄河激
Adobe PDF(502Kb)
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Submit date:2010/05/03
功能薄膜
磁控溅射
薄膜电阻
Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si
期刊论文
International Journal of Nonlinear Sciences and Numerical Simulation, 2008, 页码: 315-322
Authors:
Hu YQ(胡宇群)
;
Zhao YP(赵亚溥)
;
Yu TX(余同希)
;
Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China.
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Submit date:2009/08/03
Fractal Pattern
Dla
Anodic Bonding
Aluminum Interlayer
Mems
Diffusion-limited Aggregation
Ion Drift Processes
Borosilicate Glass
Depletion
Films
Si
Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film
期刊论文
Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing, 2008, 页码: 611-616
Authors:
Hu YQ(胡宇泉)
;
Zhao YP(赵亚溥)
;
Yu TX(余同希)
;
Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
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Submit date:2009/08/03
Anodic Bonding
Dendritic Nanostructures
Aluminum Thin Film
Depletion Layer
Mems
Ion Drift Processes
Borosilicate Glass
Depletion
中频对靶磁控溅射沉积工艺及薄膜特性研究
学位论文
硕士论文,北京: 中国科学院研究生院, 2008
Authors:
贾军伟
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Submit date:2009/04/13
Tensile Tests Of Micro Anchors Anodically Bonded Between Pyrex Glass And Aluminum Thin Film Coated On Silicon Wafer
期刊论文
Microelectronics Reliability, 2008, 页码: 1720-1723
Authors:
Hu YQ(胡宇群)
;
Zhao YP(赵亚溥)
;
Yu TX(余同希)
;
Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China.
Adobe PDF(340Kb)
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Submit date:2009/08/03
On-insulator
Adhesion
Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film
会议论文
14th International Conference on the Strength of Materials (ICSMA 14), Xian Jiaotong Univ, Xian, PEOPLES R CHINA, JUN 04-09, 2006
Authors:
Hu YQ(胡宇群)
;
Zhao YP(赵亚溥)
;
Yu TX(余同希)
;
Zhao YP
Adobe PDF(867Kb)
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View/Download:743/204
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Submit date:2009/07/23
Anodic Bonding
Dendritic Nanostructures
Aluminum Thin Film
Depletion Layer
Mems
Ion Drift Processes
Borosilicate Glass
Depletion
电子束物理气相沉积中关键力学问题的数值与实验研究
学位论文
博士论文,北京: 中国科学院研究生院, 2007
Authors:
李帅辉
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Submit date:2009/04/13
Shallow and deep nanoindentation on W/NbN nanolayers
会议论文
IUTAM Symposium on Mechanical Behavior and Micro-Mechanics of Nanostructured Materials, Beijing, China, June 27, 2005 - June 30, 2005
Authors:
Mao SX
;
Ennis BM
;
Wei YG(魏悦广)
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Submit date:2017/06/01
Alternating Layers
Bi-layer
Bilayer Period
Body-centered Cubic
Face-centered Cubic
Indentation Depth
Metal Layer
Mgo Single Crystals
Nano Layers
Niobium Nitride
Rule Of Mixture
Superhardening
On the formation of well-aligned ZnO nanowall networks by catalyst-free thermal evaporation method
期刊论文
Journal of Crystal Growth, 2007, 卷号: 305, 期号: 1, 页码: 296-301
Authors:
Yin ZG
;
Chen NF(陈诺夫)
;
Dai RX(戴瑞烜)
;
Liu L
;
Zhang XW
;
Wang XH
;
Wu JL
;
Chai CL
;
Yin, ZG (reprint author), Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China.
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Submit date:2009/08/03
Nanostructures
Physical Vapor Deposition Processes
Zno
Semiconducting Materials
Thin-films
Optical-properties
Vapor-deposition
Growth-mechanism
Nanowires
Nanosheets
Sapphire
Emission
Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy
期刊论文
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 2005, 卷号: 11, 期号: 2-3, 页码: 97-103
Authors:
Qian J(钱劲)
;
Yu TX(余同希)
;
Zhao YP(赵亚溥)
;
Zhao, YP (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech LNM, Inst Mech, Beijing 100080, Peoples R China.
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Submit date:2007/06/15