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中频对靶反应磁控溅射Al_2O_3、TiO_2、ZrO_2功能薄膜的特性研究 期刊论文
新技术新工艺, 2008, 期号: 8, 页码: 101-104+4
Authors:  贾军伟;  潘文霞;  黄河激
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功能薄膜  磁控溅射  薄膜电阻  
Fractal Pattern Formation In Anodic Bonding Of Pyrex Glass/Al/Si 期刊论文
International Journal of Nonlinear Sciences and Numerical Simulation, 2008, 页码: 315-322
Authors:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China.
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Fractal Pattern  Dla  Anodic Bonding  Aluminum Interlayer  Mems  Diffusion-limited Aggregation  Ion Drift Processes  Borosilicate Glass  Depletion  Films  Si  
Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film 期刊论文
Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing, 2008, 页码: 611-616
Authors:  Hu YQ(胡宇泉);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
Adobe PDF(861Kb)  |  Favorite  |  View/Download:754/208  |  Submit date:2009/08/03
Anodic Bonding  Dendritic Nanostructures  Aluminum Thin Film  Depletion Layer  Mems  Ion Drift Processes  Borosilicate Glass  Depletion  
中频对靶磁控溅射沉积工艺及薄膜特性研究 学位论文
硕士论文,北京: 中国科学院研究生院, 2008
Authors:  贾军伟
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Tensile Tests Of Micro Anchors Anodically Bonded Between Pyrex Glass And Aluminum Thin Film Coated On Silicon Wafer 期刊论文
Microelectronics Reliability, 2008, 页码: 1720-1723
Authors:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China.
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On-insulator  Adhesion  
Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film 会议论文
14th International Conference on the Strength of Materials (ICSMA 14), Xian Jiaotong Univ, Xian, PEOPLES R CHINA, JUN 04-09, 2006
Authors:  Hu YQ(胡宇群);  Zhao YP(赵亚溥);  Yu TX(余同希);  Zhao YP
Adobe PDF(867Kb)  |  Favorite  |  View/Download:743/204  |  Submit date:2009/07/23
Anodic Bonding  Dendritic Nanostructures  Aluminum Thin Film  Depletion Layer  Mems  Ion Drift Processes  Borosilicate Glass  Depletion  
电子束物理气相沉积中关键力学问题的数值与实验研究 学位论文
博士论文,北京: 中国科学院研究生院, 2007
Authors:  李帅辉
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Shallow and deep nanoindentation on W/NbN nanolayers 会议论文
IUTAM Symposium on Mechanical Behavior and Micro-Mechanics of Nanostructured Materials, Beijing, China, June 27, 2005 - June 30, 2005
Authors:  Mao SX;  Ennis BM;  Wei YG(魏悦广)
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Alternating Layers  Bi-layer  Bilayer Period  Body-centered Cubic  Face-centered Cubic  Indentation Depth  Metal Layer  Mgo Single Crystals  Nano Layers  Niobium Nitride  Rule Of Mixture  Superhardening  
On the formation of well-aligned ZnO nanowall networks by catalyst-free thermal evaporation method 期刊论文
Journal of Crystal Growth, 2007, 卷号: 305, 期号: 1, 页码: 296-301
Authors:  Yin ZG;  Chen NF(陈诺夫);  Dai RX(戴瑞烜);  Liu L;  Zhang XW;  Wang XH;  Wu JL;  Chai CL;  Yin, ZG (reprint author), Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China.
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Nanostructures  Physical Vapor Deposition Processes  Zno  Semiconducting Materials  Thin-films  Optical-properties  Vapor-deposition  Growth-mechanism  Nanowires  Nanosheets  Sapphire  Emission  
Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy 期刊论文
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 2005, 卷号: 11, 期号: 2-3, 页码: 97-103
Authors:  Qian J(钱劲);  Yu TX(余同希);  Zhao YP(赵亚溥);  Zhao, YP (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech LNM, Inst Mech, Beijing 100080, Peoples R China.
Adobe PDF(452Kb)  |  Favorite  |  View/Download:906/203  |  Submit date:2007/06/15