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中国科学院力学研究所机构知识库
Knowledge Management System of Institue of Mechanics, CAS
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力学所知识产出(19... [5]
State Key ... [5]
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李帅辉 [10]
樊菁 [10]
舒勇华 [10]
刘崇 [3]
王连红 [3]
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Creator:fanjing分樊菁
Creator:李帅辉
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Author:舒勇华
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预处理气氛对电子束蒸发制备YBCO薄膜性能和结构的影响
期刊论文
低温与超导/CRYOGENICS & SUPERCONDUCTIVITY, 2013, 卷号: 41, 期号: 2, 页码: 28-31
Authors:
王连红
;
舒勇华
;
刘崇
;
李帅辉
;
李保林
;
樊菁
Adobe PDF(910Kb)
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Submit date:2013/03/25
Ybco
电子束沉积
超导薄膜
预处理
沉积温度对电子束物理气相沉积制备YBCO薄膜性能与结构的影响
会议论文
中国力学大会——2013, 中国北京, 2013-08-19
Authors:
王连红
;
刘崇
;
樊菁
;
舒勇华
;
李帅辉
;
张俊
;
马月芬
View
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Adobe PDF(64Kb)
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Submit date:2014/04/02
Ybco
沉积温度
薄膜结构
性能与结构
超导性能
衬底温度
织构
表面形貌
蒸发源
电子束蒸镀
Xrd
自主研制
室温
单晶
两步法
力学研究
射线衍射
致密的
尺寸
纯度
稀薄氧压下原位生长铜薄膜的氧化程度研究
会议论文
第十二届全国物理力学学术会议, 中国广西桂林, 2012-11-12
Authors:
舒勇华
;
刘崇
;
王连红
;
张俊
;
李帅辉
;
樊菁
View
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Submit date:2014/04/02
吸附系数
氧化
稀薄氧压
铜薄膜
超微量天平
电子束物理气相沉积中的非平衡蒸气射流输运模型
会议论文
LHD2011夏季学术研讨会, 内蒙赤峰, 2011
Authors:
李帅辉
;
樊菁
;
舒勇华
Adobe PDF(888Kb)
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Submit date:2014/01/23
电子束物理气相沉积(ebpvd)
非平衡蒸气粒子输运模型
自由分子流假设失效判据
金属蒸气粒子vhs
模型参数
直接模拟monte
Carlo(dsmc)方法
大面积均匀薄膜制备工艺
A Breakdown Criterion of Free Molecular Flows and an Optimum Analysis of EBPVD
会议论文
26th International Symposium on Rarefied Gas Dynmaics (RGD26), Kyoto, JAPAN, JUN 20-JUL 25, 2008
Authors:
Li SH(李帅辉)
;
Fan J(樊菁)
;
Shu YH(舒勇华)
;
Li SH
Adobe PDF(690Kb)
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Submit date:2009/07/23
Free Molecular Assumption
Breakdown Criterion
Optimization
Thin Film
Ebpvd
Physical Vapor-deposition
Yttrium
电子束物理气相沉积钇钛合金薄膜的组分和厚度分布
期刊论文
中国科学. E辑, 技术科学, 2008, 卷号: 38, 期号: 7, 页码: 1105-1117
Authors:
李帅辉
;
舒勇华
;
樊菁
Adobe PDF(665Kb)
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Submit date:2010/05/03
电子束物理气相沉积
薄膜
厚度和组分分布
蒸气原子
非平衡输运
Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition
期刊论文
Science In China Series E-Technological Sciences, 2008, 页码: 1470-1482
Authors:
Li SH(李帅辉)
;
Shu YH(舒勇华)
;
Fan J(樊菁)
;
Fan, J (reprint author), Chinese Acad Sci, Inst Mech, Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
Adobe PDF(485Kb)
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Submit date:2009/08/03
Electron Beam Physical Vapor Deposition
Thin Film
Thickness And Species Distributions
Vapor Atom
Nonequilibrium Transport
Monte-carlo-simulation
Sphere Model
Evaporation
Thickness and component distributions of yttrium-titanium alloy films in multi-electron-beam physical vapor deposition
会议论文
the 8th Vacuum Metallurgy and Surface Engineering, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
Authors:
Li SH(李帅辉)
;
Shu YH(舒勇华)
;
Fan J(樊菁)
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Submit date:2016/06/28
Electron Beam Physical Vapor Deposition
Thin Film
Thickness And Species Distributions
Vapor Atom
Non-equilibrium Transport Keywords Plus:Monte-carlo-simulation
Sphere Model
Evaporation
Temperature distribution over 6-inch mono-crystal silicon substrate heated by parallel molybdenum filaments in vacuum
会议论文
8th Vacuum Metallurgy and Surface Engineering Conference, Shenyang, PEOPLES R CHINA, JUN 16-19, 2007
Authors:
Li SH(李帅辉)
;
Shu YH(舒勇华)
;
Tang JR(唐锦荣)
;
Fan J(樊菁)
;
Li, SH (reprint author), Chinese Acad Sci, Inst Mech, Key Lab High Temp Gas Dynam, Beijing 100080, Peoples R China.
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Submit date:2016/06/28
真空辐射加热基片的温度分布
期刊论文
力学与实践, 2006, 卷号: 28, 期号: 3, 页码: 19-23
Authors:
李帅辉
;
舒勇华
;
唐锦荣
;
樊菁
Adobe PDF(255Kb)
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Submit date:2007/06/15
薄膜气相沉积
真空辐射加热
基片温度分布